ISES Power US 2024
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Jiangtao
Hu
Onto Innovation
Sr. Director Product Marketing
Jiangtao Hu is S.Dir of Product Marketing at Onto Innovation, responsible for Metrology. Prior to this, he worked at Lam Research, leading product marketing teams in adv. process and equipment controls. Jiangtao started his career at Nanometrics in 2001, received his Ph.D. in Chemistry from Harvard University in 1999 and his bachelor’s degree in Applied Physics from Tsinghua University in 1995.
Upcoming Events
Speaker
I
Day 2
I
10:35 – 10:55
Metrology and Inspection Solutions for SiC and GaN Power Devices
Today, power devices span multiple device architecture types, are produced on a variety of wafer sizes, and leverage multiple material sets including Silicon, Silicon Carbide and Gallium Nitride, to name a few. With increasing device power ranges, breakdown voltages, switching speeds and drive currents not only does the manufacture of this class of devices become more complex but the accuracy with which each processing step is conducted plays a vital role in ensuring the performance metrics are met, further ensuring overall device reliability and lifetime. This brief overview presentation will highlight a few of the process challenges faced by device manufacturers during the production of Silicon Carbide MOSFETs and Gallium Nitride HEMT (High Electron Mobility Transistors.
Full Agenda
Onto Innovation
Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: Un-patterned wafer quality; 3D metrology spanning chip features from nanometer scale transistors to large die interconnects; macro defect inspection of wafers and packages; elemental layer composition; overlay metrology; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient. Headquartered in Wilmington, Massachusetts, Onto Innovation supports customers with a worldwide sales and service organization.
General Telephone: +1 978 253 6200
General email: info@ontoinnovation.com
Website: www.ontoinnovation.com
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